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Analysis of Mach-Zehnder interferometric micro-opto-electro-mechanical (MOEM) pressure sensor

Srinivas, T and Pattnaik, PK and Narayana, TB and Selvarajan, A (1999) Analysis of Mach-Zehnder interferometric micro-opto-electro-mechanical (MOEM) pressure sensor. In: Advanced Photonic Sensors and Applications, 30 Nov.-3 Dec. 1999, Singapore, pp. 364-371.

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The combination of integrated optics and micromachining technology offers immense potential for sensor applications. Small mechanical deformations can often produce considerable changes in optical properties of devices resulting in greatly improved sensitivities. We propose and analyze a novel pressure sensor consisting of an integrated optic Mach-Zehnder interferometer with a sensing arm fabricated on a silicon micromachined diaphragm. The analysis consists of determining the changes in optical output corresponding to the diaphragm deflections due to imposed pressure. Dynamical equations of motion are solved and the resulting displacement fields are related to refractive index and optical path length changes of the Mach-Zehnder interferometer. The results can be used to obtain the change in sensitivity due to changes in path length and refractive index variations. The analysis can easily be applied to other MOEM sensor devices such as those consisting of micromachined vibrating cantilevers and bridges controlling optical waveguides, directional couplers or multimode-multi-waveguide structures

Item Type: Conference Paper
Publisher: SPIE - The International Society for Optical Engineering
Additional Information: Copyright of this article belongs to SPIE - The International Society for Optical Engineering
Department/Centre: Division of Electrical Sciences > Electrical Communication Engineering
Date Deposited: 26 Jul 2007
Last Modified: 27 Aug 2008 12:43
URI: http://eprints.iisc.ac.in/id/eprint/10292

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