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Gupta, Suman A and Shenoy, Apoorva and Monisha, M and Uma, V and Vijayaraghavan, MN and Bhat, Navakanta (2014) Stress Engineering using Si3N4 for stiction free release of SOI beams. In: 17th International Workshop on the Physics of Semiconductor Devices (IWPSD), DEC 10-14, 2013, Noida, INDIA, pp. 491-493.

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