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Chhabra, Priya and Sharma, Anurekha and Krishna, Vamsi NP (2016) Fabrication and characterisation of bulk micromachined ZnO energy transducer with interdigitated electrodes. In: 2nd International Conference on Surfaces, Coatings and Nanostructured Materials - Asia (NANOSMAT-Asia), MAR 24-27, 2015, Kayseri, TURKEY, pp. 1055-1066.