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Nayak, Jagannath and Srinivas, Talabuttula and Selvarajan, Anant and Sastry, Darba VK (2006) Design and analysis of an intensity modulated micro-opto-electro-mechanical accelerometer based on nonuniform cantilever beam proof mass. In: Journal of Microlithography Microfabrication and Microsystems, 5 (4). 043012-01-043012-10.
