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Journal Article

Behera, Amruta Ranjan and Shaik, Habibuddin and Rao, G Mohan and Pratap, Rudra (2019) A Technique for Estimation of Residual Stress and Young's Modulus of Compressively Stressed Thin Films Using Microfabricated Beams. In: JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 28 (6). pp. 1039-1054.

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