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Journal Article

Kolla, Lakshmi Ganapathi and Ding, Yiming and Misra, Durga and Bhat, Navakanta (2018) Interface states reduction in atomic layer deposited TiN/ZrO2/Al2O3/Ge gate stacks. In: JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 36 (2).

Addepalli, Suresh and Kolla, Lakshmi Ganapathi and Suda, Uthanna (2017) Electrical, optical, structural and chemical properties of Al2TiO5 films for high-kappa gate dielectric applications. In: MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING, 57 . pp. 137-146.

This list was generated on Sat Feb 22 03:51:48 2020 IST.