ePrints@IIScePrints@IISc Home | About | Browse | Latest Additions | Advanced Search | Contact | Help

Browse by Author

Up a level
Export as [feed] Atom [feed] RSS 1.0 [feed] RSS 2.0
Group by: Item Type | No Grouping
Number of items: 2.

Subhani, KN and Khandare, S and N, V and Bhat, KN (2022) Localized suspended micro-heater structure using dry etching for sensing and actuation application. In: Journal of Manufacturing Processes, 83 . pp. 281-289.

Subhani, KN and Khandare, S and Biradar, RC and Bhat, KN (2020) Novel fabrication of fixed suspended silicon nitride structure for MEMS devices with dry etching. In: IOP Conference Series: Materials Science and Engineering, 2nd International Conference on Materials Science and Manufacturing Technology 2020, ICMSMT 2020, 9-10 April 2020, Hotel AloftCoimbatore, Tamil Nadu; India.

This list was generated on Mon Jul 15 13:14:58 2024 IST.