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Journal Article

Jithin, MmA and Ganapathi, Kolla Lakshmi and Vikram, G N V R and Udayashankar, N K and Mohan, S (2018) Pulsed DC magnetron sputtered titanium nitride thin films for localized heating applications in MEMS devices. In: SENSORS AND ACTUATORS A-PHYSICAL, 272 . pp. 199-205.

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