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Conference Paper

Lee, Kyung Il and Nayak, MM and Takao, Hidekuni and Sawada, Kazuaki and Ishida, Makoto and Rajanna, K (2005) MEMS Based High Dose Radiation Resistant SOI Pressure Sensor for Aerospace Applications. In: Asia Pacific Conference on Transducers and Micro-Nano Technology, JUL 04-07, 2004, Sapporo, JAPAN, pp. 237-247.

Journal Article

Takao, Hidekuni and Yong, Chuck-Chen and Rajanna, K and Ishida, Makoto (2000) Shape deterioration of mesa structures in post-CMOS anisotropic etching of silicon microsensors: an experimental study. In: Sensors and Actuators A- Physical, 86 (1-2). pp. 115-121.

This list was generated on Sat Jun 15 16:35:26 2024 IST.