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Conference Paper

Subhani, KN and Khandare, S and Biradar, RC and Bhat, KN (2020) Novel fabrication of fixed suspended silicon nitride structure for MEMS devices with dry etching. In: IOP Conference Series: Materials Science and Engineering, 2nd International Conference on Materials Science and Manufacturing Technology 2020, ICMSMT 2020, 9-10 April 2020, Hotel AloftCoimbatore, Tamil Nadu; India.

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