A Mechanically Coupled Piezoelectric MEMS Filter Based on Support Transducer Topology

Tang, K-W and Zope, A and Lin, Z-W and Pillai, G and Li, S-S (2023) A Mechanically Coupled Piezoelectric MEMS Filter Based on Support Transducer Topology. In: 22nd International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers 2023, 25 June 2023through 29 June 2023, Kyoto, Japan, pp. 1821-1824.

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Abstract

This paper presents the development and experimental results of a two-port, low insertion loss (1.9dB) MEMS filter based on a Support Transducer (ST) topology using thin-film piezoelectric (AlN) on substrate (TPoS) technique at 10MHz. The filter utilizes mechanically coupled (quarter-wavelength, λ/4) radial contour mode disks to form a desirable passband after termination. The ST is designed using length extension (LE) mode to maximize overall transduction efficiency and a high-velocity coupling scheme to drive the central disks. The properly matched filter achieved 0.8-bandwidth (80kHz) with <0.5dB in-band ripple under a small matching impedance of (39+j375)Ω for channel-select applications. The fabricated filter has a measured minimum insertion loss of 13dB without termination while a flat pass-band response with a maximum insertion loss of 1.9dB with termination. The proposed design achieves a better insertion loss using a lower matching impedance compared to the previous single resonator ST design, thus enabling high-performance MEMS channel-select filters. The presented results demonstrate the potential of the proposed design for applications in wireless communication systems, especially for IoT devices. © 2023 IEEJ.

Item Type:	Conference Paper
Publication:	2023 22nd International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers 2023
Publisher:	Institute of Electrical and Electronics Engineers Inc.
Additional Information:	The copyright for this article belongs to Institute of Electrical and Electronics Engineers Inc.
Department/Centre:	Division of Interdisciplinary Sciences > Centre for Nano Science and Engineering
Date Deposited:	24 Sep 2024 09:05
Last Modified:	24 Sep 2024 09:05
URI:	http://eprints.iisc.ac.in/id/eprint/85228

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