A probing system with a rotatable tip for 3D coordinate nanometrology

Jayanth, GR and Sri Muthu Mrinalini, R (2020) A probing system with a rotatable tip for 3D coordinate nanometrology. In: Measurement Science and Technology, 31 (4).

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Abstract

Performing coordinate nanometrology of arbitrarily shaped three-dimensional (3D) objects about a micrometer or less in size remains a challenge. In this paper we report a probing system with a rotatable tip for performing coordinate metrology on such objects. An atomically sharp tip is mounted on an active ball-and-socket microjoint, and the two are integrated into a conventional microcantilever probe. The ball-and-socket joint allows the tip to be pointed in any direction, and thereby enables access to any desired 3D feature, while the probe is employed to repeatedly touch the sample surface and extract its corresponding coordinates. The system has been demonstrated to access the surfaces of both horizontally and vertically oriented muscovite mica surfaces and to perform their coordinate nanometrology. © 2020 IOP Publishing Ltd.

Item Type:	Journal Article
Publication:	Measurement Science and Technology
Publisher:	Institute of Physics Publishing
Additional Information:	The copyright of this article belongs to Institute of Physics Publishing
Keywords:	Scanning probe microscopy, 3D coordinates; Ball and sockets; Coordinate metrology; Micro-cantilevers; Nanometrology; Probing system; Sample surface; Three-dimensional (3D) objects, Mica
Department/Centre:	Division of Physical & Mathematical Sciences > Instrumentation Appiled Physics
Date Deposited:	19 Jun 2020 07:01
Last Modified:	19 Jun 2020 07:01
URI:	http://eprints.iisc.ac.in/id/eprint/65081

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