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Magnetic Force Based Resonant Magnetic Field Sensor with Piezoelectric Readout

Selvaraj, S and Gandhi, U and Mangalanathan, U and Hegde, G (2020) Magnetic Force Based Resonant Magnetic Field Sensor with Piezoelectric Readout. In: IEEE Sensors Journal, 20 (22). pp. 13291-13301.

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Official URL: https://dx.doi.org/10.1109/JSEN.2020.3004272

Abstract

This paper presents the design, fabrication and testing of a prototype resonant magnetic field sensor utilizing piezoelectric excitation and detection with ferromagnetic film at the free end of micro-cantilever for magnetic field detection. The change in the resonant frequency of the beam due to the presence of an external magnetic field is measured using a sensing piezo at the fixed end of the beam. Customized process steps are followed with six masks to fabricate the micro resonant magnetic field sensor with Aluminum nitride as piezoelectric material and soft ferromagnetic material for magnetic field detection. The mechanical, electrical and magnetic characterizations are carried out to evaluate the performance of the sensor. Results from analytical and experimentation are in close agreement and are in the same dimensional range. Dispenser printed permanent magnets are also integrated and this is the first of its kind to enhance the magnetic property in micro resonant magnetic field sensors. © 2001-2012 IEEE.

Item Type: Journal Article
Additional Information: The copyright of this article belongs to Institute of Electrical and Electronics Engineers Inc.
Keywords: Aluminum nitride; Critical currents; Ferromagnetic materials; Ferromagnetism; Magnetic sensors; Magnetometers; Natural frequencies; Piezoelectricity, External magnetic field; Ferromagnetic films; Magnetic characterization; Magnetic force; Micro-cantilevers; Piezoelectric excitation; Resonant magnetic field sensors; Soft ferromagnetic materials, Magnetic fields
Department/Centre: Division of Interdisciplinary Sciences > Centre for Biosystems Science and Engineering
Division of Mechanical Sciences > Aerospace Engineering(Formerly Aeronautical Engineering)
Division of Interdisciplinary Sciences > Centre for Nano Science and Engineering
Depositing User: Bharath k v
Date Deposited: 13 Jan 2021 09:52
Last Modified: 13 Jan 2021 09:52
URI: http://eprints.iisc.ac.in/id/eprint/67302

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