Performance Analysis of Optical MEMS Based Pressure Sensor Using Ring Resonators Structure on Circular Diaphragm

Upadhyaya, AM and Srivastava, M and Sharan, P and Srinivas, T (2019) Performance Analysis of Optical MEMS Based Pressure Sensor Using Ring Resonators Structure on Circular Diaphragm. In: 2019 IEEE Region 10 Conference: Technology, Knowledge, and Society, TENCON 2019, 17-20 October 2019, Hotel Grand Hyatt Kerala; India, pp. 668-672.

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Abstract

Proposed work here consists of Micro Opto Electro Mechanical System based pressure sensor integrated with ring resonators. Single, double and triple ring resonators are integrated with photonic crystal sensing layer have been investigated for different sensitivity and minimum detectability by coupling FEA modelling with optical system. Photonic crystal sensing layer is modelled using Ansys Multiphysics for modelling and analysis. For applied pressure in the range of 1Mpa to 6Mpa, deformation and Maximum stress developed in different direction is calculated. Influence of mechanical deformation and stress developed during application of pressure for peak resonance wavelength shift is explored for each combination of ring resonators. Minimum observable deformation of 1.0073μ \mathrmm for single ring resonator at pressure of 6.3μ \mathrmPa. Deformation of 1.051μ \mathrmm for double ring resonator at pressure of 6.5\ μ \mathrmPa and 1.009\ μ \mathrmm deformation for triple ring resonator at pressure of 6.9\ μ \mathrmPa is detected. Maximum sensitivity of 450nm/RIU and Quality factor of 12,245 is observed for single ring resonator. Proposed type of sensor investigation having remarkable application in biomedical instruments with appropriate design.

Item Type:	Conference Paper
Publication:	IEEE Region 10 Annual International Conference, Proceedings/TENCON
Publisher:	Institute of Electrical and Electronics Engineers Inc.
Additional Information:	Copyright of this article belongs to Institute of Electrical and Electronics Engineers Inc.
Keywords:	Deformation; Diaphragms; MOEMS; Optical systems; Photonic crystals; Pressure sensors; Strain; Stresses, Biomedical instruments; Double-ring resonators; Mechanical deformation; Micro opto electro mechanical systems; Modelling and analysis; Resonance wavelengths; Ring resonator; Sensitivity, Optical resonators
Department/Centre:	Division of Electrical Sciences > Electrical Communication Engineering
Date Deposited:	11 Feb 2020 05:55
Last Modified:	11 Feb 2020 05:55
URI:	http://eprints.iisc.ac.in/id/eprint/64448

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