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Flexible silicon nitride photonic integrated circuit embedded in polymer handle

Kallega, Rakshitha and Nambiar, Siddharth and Kalathimekkad, Sandeep and Mere, Viphretuo and Selvaraja, Shankar Kumar (2019) Flexible silicon nitride photonic integrated circuit embedded in polymer handle. In: Conference on Integrated Optics - Devices, Materials, and Technologies XXIII, FEB 04-07, 2019, San Francisco, CA.

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Official URL: https://doi.org/ 10.1117/12.2509523

Abstract

In this paper, we present a hybrid process to make a flexible photonic circuit. The photonic circuit is fabricated on a Silicon substrate with PECVD Silicon Nitride (SiN) as a waveguide layer on an oxide layer. The SiN waveguide circuit is fabricated using conventional lithography and dry etching followed by Si substrate thinned down to 10micrometer. The thin-film photonic circuit integrity after wafer-thinning and layer transfer is characterized by the waveguide performance, grating coupler efficiency and ring resonator performance. We observe no degradation in device and circuit performance. We present detailed process flow, SiN-to-PDMS embedding process and detailed device characterization.

Item Type: Conference Proceedings
Additional Information: Conference on Integrated Optics - Devices, Materials, and Technologies XXIII, San Francisco, CA, FEB 04-07, 2019
Department/Centre: Division of Interdisciplinary Research > Centre for Nano Science and Engineering
Depositing User: Id for Latest eprints
Date Deposited: 22 Jul 2019 08:41
Last Modified: 22 Jul 2019 08:41
URI: http://eprints.iisc.ac.in/id/eprint/62897

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