Mathematical modeling of optical MEMS differential pressure sensor using waveguide Bragg gratings embedded in Mach Zehnder interferometer

Thondagere, Chandrika and Kaushalram, Archana and Srinivas, Talabattula and Hegde, Gopalkrishna (2018) Mathematical modeling of optical MEMS differential pressure sensor using waveguide Bragg gratings embedded in Mach Zehnder interferometer. In: JOURNAL OF OPTICS, 20 (8).

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Abstract

This paper presents theoretical analysis of a silicon based micro-machined differential pressure sensor using a square shaped clamped diaphragm and surface relief waveguide Bragg gratings embedded in a Mach Zehnder interferometer (MZI). Each of the arms of the MZI has one surface relief Bragg grating embedded in it. Each grating is mounted at the edge of a micro-machined diaphragm so as to obtain maximum stress. Coupled mode theory has been used to design the directional coupler to equally couple the light into both of the arms of MZI and also to design and analyse the shifts in the wavelengths of the Bragg gratings due to applied pressures. The wavelength shift difference of the two gratings gives the differential pressure sensitivity and also eliminates the noise due to temperature variation. Simulation results indicate that the differential pressure measurement sensitivity is 0.2 pm/Pa.

Item Type:	Journal Article
Publication:	JOURNAL OF OPTICS
Publisher:	IOP PUBLISHING LTD, TEMPLE CIRCUS, TEMPLE WAY, BRISTOL BS1 6BE, ENGLAND
Additional Information:	Copyright of this article belong to IOP PUBLISHING LTD, TEMPLE CIRCUS, TEMPLE WAY, BRISTOL BS1 6BE, ENGLAND
Department/Centre:	Division of Electrical Sciences > Electrical Communication Engineering
Date Deposited:	02 Aug 2018 15:47
Last Modified:	15 Oct 2018 10:33
URI:	http://eprints.iisc.ac.in/id/eprint/60349

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