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Integrated X-Band Inductor With a Nanoferrite Film Core

Sai, Ranajit and Kulkarni, Suresh D and Yamaguchi, Masahiro and Bhat, Navakanta and Shivashankar, S A (2017) Integrated X-Band Inductor With a Nanoferrite Film Core. In: IEEE MAGNETICS LETTERS, 8 .

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Official URL: http://dx.doi.org/10.1109/LMAG.2017.2655495

Abstract

The performance of an on-chip X-band (8-12 GHz) inductor, integrated with a partially-inverted zinc ferrite (piZF) film, is presented. The ferrite-core inductor is realized in three steps-first, fabrication of an uncoated spiral inductor via a 130 nm Si-CMOS process in a foundry, followed by passivation removal around the coil by reactive ion etching (RIE), and finally, deposition of piZF directly on the coil by microwave-assisted solution-based processing. The resulting piZF film covers the inductor coil conformally and exhibits high saturation magnetization (M-S = 130 emu/cm(3)) and very low coercivity (H-C < 15 Oe) at room temperature. The ferromagnetic resonance frequency (f(FMR)) of piZF was determined by the coplanar-waveguide ferromagnetic-resonance technique to be similar to 30 GHz, well above the frequency of targeted X-band applications. The inductance-density and Q-factor of the piZF-coated inductor are enhanced by 13% and 25% to 450 nH/mm(2) and 5.8, respectively, at 10 GHz. This is the first report of an on-chip ferrite-core RF inductor operating above 6 GHz.

Item Type: Journal Article
Additional Information: Copy right for this article belongs to the IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC, 445 HOES LANE, PISCATAWAY, NJ 08855-4141 USA
Department/Centre: Division of Interdisciplinary Research > Centre for Nano Science and Engineering
Depositing User: Id for Latest eprints
Date Deposited: 20 May 2017 03:59
Last Modified: 20 May 2017 03:59
URI: http://eprints.iisc.ac.in/id/eprint/56698

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