Sharma, Akshdeep and Suma, BN and Bhat, KN and Naik, AK (2017) Gallium-Doped Piezoresistive Sensor With Optimized Focused Ion Beam Implantation. In: JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 26 (1). pp. 127-134.
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Official URL: http://dx.doi.org/10.1109/JMEMS.2016.2620801
| Item Type: | Journal Article |
|---|---|
| Publication: | JOURNAL OF MICROELECTROMECHANICAL SYSTEMS |
| Additional Information: | Copyright for this article belongs to the IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC, 445 HOES LANE, PISCATAWAY, NJ 08855-4141 USA |
| Department/Centre: | Division of Interdisciplinary Sciences > Centre for Nano Science and Engineering |
| Date Deposited: | 26 Apr 2017 07:22 |
| Last Modified: | 25 Feb 2019 11:20 |
| URI: | http://eprints.iisc.ac.in/id/eprint/56620 |
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