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Gallium-Doped Piezoresistive Sensor With Optimized Focused Ion Beam Implantation

Sharma, Akshdeep and Suma, BN and Bhat, KN and Naik, AK (2017) Gallium-Doped Piezoresistive Sensor With Optimized Focused Ion Beam Implantation. In: JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 26 (1). pp. 127-134.

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Official URL: http://dx.doi.org/10.1109/JMEMS.2016.2620801
Item Type: Journal Article
Additional Information: Copyright for this article belongs to the IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC, 445 HOES LANE, PISCATAWAY, NJ 08855-4141 USA
Department/Centre: Division of Interdisciplinary Research > Centre for Nano Science and Engineering
Depositing User: Id for Latest eprints
Date Deposited: 26 Apr 2017 07:22
Last Modified: 25 Feb 2019 11:20
URI: http://eprints.iisc.ac.in/id/eprint/56620

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