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Design and Evaluation of Flexural Harmonic Probes for Multifrequency Atomic Force Microscopy

Sriramshankar, R and Jayanth, G R (2016) Design and Evaluation of Flexural Harmonic Probes for Multifrequency Atomic Force Microscopy. In: 1st International Conference on Manipulation, Automation and Robotics at Small Scales (MARSS), JUL 18-21, 2016, Paris, FRANCE.

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Official URL: http://dx.doi.org/10.1109/MARSS.2016.7561736

Abstract

Multifrequency atomic force microscopy involves excitation of the cantilever probe and measurement of its response at multiple frequencies. This enables performing simultaneous material characterization and topography estimation. This paper reports the design, fabrication and evaluation of micro-cantilever probes with specified flexural eigen-frequencies. These frequencies are chosen to enhance the sensitivity to tip-sample forces in multifrequency atomic force microscopy. The probe's design involves choosing a suitable nominal geometry, development of a lumped parameter model for its flexural dynamics and iteratively tuning the dimensions so that the targeted eigen-frequencies are obtained. Using this approach, a cantilever probe having flexural eigen-frequencies in the ratio 1:2 is designed. A prototype of the designed probe has been fabricated and evaluated. The experimentally evaluated eigen-frequencies match the target frequencies by 99.7%.

Item Type: Conference Proceedings
Additional Information: Copy right for this article belongs to the IEEE, 345 E 47TH ST, NEW YORK, NY 10017 USA
Department/Centre: Division of Physical & Mathematical Sciences > Instrumentation Appiled Physics
Depositing User: Id for Latest eprints
Date Deposited: 20 Jan 2017 04:30
Last Modified: 20 Jan 2017 04:30
URI: http://eprints.iisc.ac.in/id/eprint/55941

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