Note: Experimental observation of nano-channel pattern in light sheet laser interference nanolithography system

Mohan, Kavya and Mondal, Partha Pratim (2016) Note: Experimental observation of nano-channel pattern in light sheet laser interference nanolithography system. In: REVIEW OF SCIENTIFIC INSTRUMENTS, 87 (6).

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Abstract

We experimentally observed nano-channel-like pattern in a light-sheet based interference nano-lithography system. The optical system created nano-channel-like patterned illumination. Coherent counter-propagating light sheets are made to interfere at and near geometrical focus along the propagation z-axis. This results in the formation of nano-channel-like pattern (of size approximate to 300 nm and inter-channel periodicity of approximate to 337.5 nm) inside the sample due to constructive and destructive interference. In addition, the technique has the ability to generate large area patterning using larger light-sheets. Exciting applications are in the broad field of nanotechnology (nano-electronics and nano-fluidics). Published by AIP Publishing.

Item Type:	Journal Article
Publication:	REVIEW OF SCIENTIFIC INSTRUMENTS
Publisher:	AMER INST PHYSICS
Additional Information:	Copy right for this article belongs to the AMER INST PHYSICS, 1305 WALT WHITMAN RD, STE 300, MELVILLE, NY 11747-4501 USA
Department/Centre:	Division of Physical & Mathematical Sciences > Instrumentation Appiled Physics
Date Deposited:	19 Aug 2016 09:54
Last Modified:	19 Aug 2016 09:54
URI:	http://eprints.iisc.ac.in/id/eprint/54420

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