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Note: A resonating reflector-based optical system for motion measurement in micro-cantilever arrays

Sathishkumar, P and Punyabrahma, P and Mrinalini, Sri Muthu R and Jayanth, GR (2015) Note: A resonating reflector-based optical system for motion measurement in micro-cantilever arrays. In: REVIEW OF SCIENTIFIC INSTRUMENTS, 86 (9).

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Official URL: http://dx.doi.org/10.1063/1.4930877

Abstract

A robust, compact optical measurement unit for motion measurement in micro-cantilever arrays enables development of portable micro-cantilever sensors. This paper reports on an optical beam deflection-based system to measure the deflection of micro-cantilevers in an array that employs a single laser source, a single detector, and a resonating reflector to scan the measurement laser across the array. A strategy is also proposed to extract the deflection of individual cantilevers from the acquired data. The proposed system and measurement strategy are experimentally evaluated and demonstrated to measure motion of multiple cantilevers in an array. (C) 2015 AIP Publishing LLC.

Item Type: Journal Article
Additional Information: Copy right for this article belongs to the AMER INST PHYSICS, 1305 WALT WHITMAN RD, STE 300, MELVILLE, NY 11747-4501 USA
Department/Centre: Division of Physical & Mathematical Sciences > Instrumentation Appiled Physics
Depositing User: Id for Latest eprints
Date Deposited: 05 Nov 2015 07:27
Last Modified: 05 Nov 2015 07:27
URI: http://eprints.iisc.ac.in/id/eprint/52692

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