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Direct Measurement of Three-Dimensional Forces in Atomic Force Microscopy

Mrinalini, Sri Muthu R and Sriramshankar, R and Jayanth, GR (2015) Direct Measurement of Three-Dimensional Forces in Atomic Force Microscopy. In: IEEE-ASME TRANSACTIONS ON MECHATRONICS, 20 (5). pp. 2184-2193.

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Official URL: http://dx.doi.org/10.1109/TMECH.2014.2366794

Abstract

Direct measurement of three-dimensional (3-D) forces between an atomic force microscope (AFM) probe and the sample benefits diverse applications of AFM, including force spectroscopy, nanometrology, and manipulation. This paper presents the design and evaluation of a measurement system, wherein the deflection of the AFM probe is obtained at two points to enable direct measurement of all the three components of 3-D tip-sample forces in real time. The optimal locations for measurement of deflection on the probe are derived for a conventional AFM probe. Further, a new optimal geometry is proposed for the probe that enables measurement of 3-D forces with identical sensitivity and nearly identical resolution along all three axes. Subsequently, the designed measurement system and the optimized AFM probe are both fabricated and evaluated. The evaluation demonstrates accurate measurement of tip-sample forces with minimal cross-sensitivities. Finally, the real-time measurement system is employed as part of a feedback control system to regulate the normal component of the interaction force, and to perform force-controlled scribing of a groove on the surface of polymethyl methacrylate.

Item Type: Journal Article
Additional Information: Copy right for this article belongs to the IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC, 445 HOES LANE, PISCATAWAY, NJ 08855-4141 USA
Keywords: Atomic force microscopy (AFM); direct measurement of 3-D forces; force control; optical beam deflection
Department/Centre: Division of Physical & Mathematical Sciences > Instrumentation Appiled Physics
Depositing User: Id for Latest eprints
Date Deposited: 09 Oct 2015 04:21
Last Modified: 09 Oct 2015 04:21
URI: http://eprints.iisc.ac.in/id/eprint/52500

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