Rudraswamy, SB and Basu, Palash Kumar and Bhat, Navakanta (2014) Sensitivity characteristics of Ag doped BaTiO3-CuO mixed oxide as Carbon-dioxide S ensor. In: IEEE International Conference on Electronics, Computing and Communication Technologies (IEEE CONECCT), JAN 06-07, 2014, Indian Inst Sci, Bangalore, INDIA.
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Abstract
Ag doped BaTiO3-CuO mixed oxide thin films are evaluated for their carbon-dioxide sensing characteristics. The metal oxide films of different thicknesses are deposited on oxidized p type Si < 100 > substrate by RF Sputtering. Sensing characteristics for different CO2 concentration, (300 ppm - 1000 ppm) are obtained for different operating temperatures, (100 degrees C - 400 degrees C). Optimum temperature for maximum sensitivity is found to be 250 degrees C. The effect of annealing on sensing properties is also evaluated. The unannealed films give better sensitivity than that of annealed films. Response time and recovery time are also calculated.
Item Type: | Conference Proceedings |
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Series.: | IEEE International Conference on Electronics Computing and Communication Technologies |
Publisher: | IEEE |
Additional Information: | Copy right for this article belongs to the IEEE International Conference on Electronics, Computing and Communication Technologies (IEEE CONECCT), Indian Inst Sci, Bangalore, INDIA, JAN 06-07, 2014 |
Keywords: | Carbon dioxide; Gas sensor; BaTiO3-CuO |
Department/Centre: | Division of Electrical Sciences > Electrical Communication Engineering |
Date Deposited: | 01 Apr 2015 12:16 |
Last Modified: | 01 Apr 2015 12:16 |
URI: | http://eprints.iisc.ac.in/id/eprint/51170 |
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