Effect of post-deposition annealing on transverse piezoelectric coefficient and vibration sensing performance of ZnO thin films

Joshi, Sudeep and Nayak, MM and Rajanna, K (2014) Effect of post-deposition annealing on transverse piezoelectric coefficient and vibration sensing performance of ZnO thin films. In: APPLIED SURFACE SCIENCE, 296 . pp. 169-176.

PDF app_sur_sci_296_169__2014.pdf - Published Version Restricted to Registered users only Download (2MB) | Request a copy

Abstract

The present experimental study investigates the influence of post-deposition annealing on the transverse piezoelectric coefficient (d(31)) value of ZnO thin films deposited on a flexible metal alloy substrate, and its relationship with the vibration sensing performance. Highly c-axis oriented and crystalline ZnO thin films were deposited on flexible Phynox alloy substrate via radio frequency (RF) reactive magnetron sputtering. ZnO thin film samples were annealed at different temperatures ranging from 100 degrees C to 500 degrees C, resulting in the temperature of 300 degrees C determined as the optimum annealing temperature. The crystallinity, morphology, microstructure, and rms surface roughness of annealed ZnO thin films were systematically investigated by X-ray Diffraction (XRD), Scanning Electron Microscopy (SEM), and Atomic Force Microscopy (AFM), respectively. The piezoelectric d(31) coefficient value was measured by 4-point bending method. ZnO thin film annealed at 300 degrees C was highly c-axis oriented, crystalline, possesses fine surface morphology with uniformity in the grain size. This film showed higher d(31) coefficient value of 7.2 pm V-1. A suitable in-house designed and developed experimental set-up, for evaluating the vibration sensing performance of annealed ZnO thin films is discussed. As expected the ZnO thin film annealed at 300 degrees C showed relatively better result for vibration sensing studies. It generates comparatively higher peak output voltage of 147 mV, due to improved structural and morphological properties, and higher piezoelectric d(31) coefficient value. (C) 2014 Elsevier B. V. All rights reserved.

Item Type:	Journal Article
Publication:	APPLIED SURFACE SCIENCE
Publisher:	ELSEVIER SCIENCE BV
Additional Information:	copyright for this article belongs to ELSEVIER SCIENCE BV,NETHERLANDS
Keywords:	Annealing; Flexible substrate; Piezoelectric coefficient; Sputtering; ZnO thin film
Department/Centre:	Division of Interdisciplinary Sciences > Centre for Nano Science and Engineering Division of Physical & Mathematical Sciences > Instrumentation Appiled Physics
Date Deposited:	08 Apr 2014 05:46
Last Modified:	08 Apr 2014 05:46
URI:	http://eprints.iisc.ac.in/id/eprint/48820

Actions (login required)

View Item