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Flexible Phynox Alloy with Integrated Piezoelectric Thin Film for Micro Actuation Application

Joshi, Sudeep and Nayak, MM and Rajanna, K (2012) Flexible Phynox Alloy with Integrated Piezoelectric Thin Film for Micro Actuation Application. In: 11th IEEE Sensors Conference, OCT 28-31, 2012 , Taipei, TAIWAN, pp. 1866-1869.

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Official URL: http://dx.doi.org/10.1109/ICSENS.2012.6411523


In this paper, we report on the application aspect of piezoelectric ZnO thin film deposited on flexible phynox alloy substrate. Highly crystalline piezoelectric ZnO thin films were deposited by RF reactive magnetron sputtering and were characterized by XRD, SEM, AFM analysis. Also, the effective d(33) coefficient value measurement was performed. The actuator element is a circular diaphragm of phynox alloy on to which piezoelectric ZnO thin film was deposited. ZnO film deposited actuator element was firmly fixed inside a suitable concave perspex mounting designed specifically for micro actuation purpose. The actuator element was excited at different frequencies for the supply voltages of 2V, 5V and 8V. Maximum deflection of the ZnO film deposited diaphragm was measured to be 1.25 mu m at 100 Hz for the supply voltage of 8V. The developed micro actuator has the potential to be used as a micro pump for pumping nano liters to micro liters of fluids per minute for numerous biomedical and aerospace applications.

Item Type: Conference Proceedings
Series.: IEEE Sensors
Publisher: IEEE
Additional Information: Copyright for this article belongs to the IEEE, USA.
Keywords: Micro actuator; ZnO thin film; Piezoelectricity
Department/Centre: Division of Physical & Mathematical Sciences > Instrumentation Appiled Physics
Date Deposited: 04 May 2013 05:55
Last Modified: 04 May 2013 05:55
URI: http://eprints.iisc.ac.in/id/eprint/46509

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