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AFM cantilever with integrated piezoelectric thin film for micro-actuation

Viannie, Leema Rose and Joshi, Sudeep and Jayanth, GR and Rajanna, K and Radhakrishna, V (2012) AFM cantilever with integrated piezoelectric thin film for micro-actuation. In: 11th IEEE Sensors Conference, OCT 28-31, 2012, Taipei, TAIWAN, pp. 1838-1841.

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Official URL: http://dx.doi.org/10.1109/ICSENS.2012.6411278


This work presents micro-actuation of atomic force microscopy (AFM) cantilevers using piezoelectric Zinc Oxide (ZnO) thin film. In tapping mode AFM, the cantilever is driven near its resonant frequency by an external oscillator such as piezotube or stack of piezoelectric material. Use of integrated piezoelectric thin film for AFM cantilever eliminates the problems like inaccurate tuning and unwanted vibration modes. In this work, silicon AFM cantilevers were sputter deposited with ZnO piezoelectric film along with top and bottom metallic electrodes. The self-excitation of the ZnO coated AFM cantilever was studied using Laser Doppler Vibrometer (LDV). At its resonant frequency (227.11 kHz), the cantilever displacement varies linearly with applied excitation voltage. We observed an increase in the actuation response (131nm/V) due to improved quality of ZnO films deposited at 200 degrees C.

Item Type: Conference Proceedings
Series.: IEEE Sensors
Publisher: IEEE
Additional Information: Copyright for this article belongs to the IEEE, USA.
Department/Centre: Division of Physical & Mathematical Sciences > Instrumentation Appiled Physics
Date Deposited: 04 May 2013 09:57
Last Modified: 04 May 2013 09:57
URI: http://eprints.iisc.ac.in/id/eprint/46508

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