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Tuning the Sensitivity of a Metal-Based Piezoresistive Sensor Using Electromigration

Mohanasundaram, SM and Pratap, Rudra and Ghosh, Arindam (2012) Tuning the Sensitivity of a Metal-Based Piezoresistive Sensor Using Electromigration. In: JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 21 (6). pp. 1276-1278.

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Official URL: http://dx.doi.org/10.1109/JMEMS.2012.2211579

Abstract

We report a simple method to enhance the piezoresistive sensitivity of a gold film by more than 30 times and demonstrate it using a microcantilever resonator. Our method depends on controlled electromigration that we use to tune the resistance and sensitivity of the piezoresistive sensor. We attribute the enhancement in strain sensitivity to the creation of an inhomogeneous conduction medium at a predefined location by directed and controlled electromigration. We understand this phenomenon with tunneling-percolation model, which was originally hypothesized to explain nonuniversal percolation behavior of composite materials. 2012-0174]

Item Type: Journal Article
Additional Information: Copyright for this article belongs to IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC, PISCATAWAY, USA
Keywords: Cantilever;electromigration;percolation;piezoresistance;sensitivity
Department/Centre: Division of Biological Sciences > Centre for Neuroscience
Division of Physical & Mathematical Sciences > Physics
Depositing User: Francis Jayakanth
Date Deposited: 04 Jan 2013 06:04
Last Modified: 04 Jan 2013 06:04
URI: http://eprints.iisc.ac.in/id/eprint/45622

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