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Process Kinetics during RF Sputtering of LiCoO2 Thin Films for Micro Battery Applications

Nimisha, CS and Venketesh, G (2009) Process Kinetics during RF Sputtering of LiCoO2 Thin Films for Micro Battery Applications. In: MRS Fall meeting, Boston U.S.A.

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Item Type: Conference Paper
Department/Centre: Division of Physical & Mathematical Sciences > Instrumentation Appiled Physics
Depositing User: Ms TV Yashodha
Date Deposited: 16 Dec 2011 08:31
Last Modified: 16 Dec 2011 08:31
URI: http://eprints.iisc.ac.in/id/eprint/41231

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