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Design Fabrication and Calibration of Three Target Magnetron Co-sputtering System for Shape memory Alloy Thin Films

Sharma, Sudhir Kumar and Jithin, MA and Sumesh, MA and Mohan, S (2009) Design Fabrication and Calibration of Three Target Magnetron Co-sputtering System for Shape memory Alloy Thin Films. In: Proc. of Third National Conference on MEMS, Smart Structures and Materials (ISSS-2009) at CGCRI, 151-154, Kolkata.

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Item Type: Conference Paper
Department/Centre: Division of Physical & Mathematical Sciences > Instrumentation Appiled Physics
Depositing User: Ms TV Yashodha
Date Deposited: 16 Dec 2011 08:35
Last Modified: 16 Dec 2011 08:35
URI: http://eprints.iisc.ac.in/id/eprint/41226

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