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Design, Fabrication and testing of Microheater with uniform thermal distribution and low power consumption for gas sensor

Velmathi, G and Mohan, S (2009) Design, Fabrication and testing of Microheater with uniform thermal distribution and low power consumption for gas sensor. In: Proc. of Third National Conference on MEMS, Smart Structures and Materials.

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Item Type: Conference Paper
Department/Centre: Division of Physical & Mathematical Sciences > Instrumentation Appiled Physics
Date Deposited: 16 Dec 2011 08:36
Last Modified: 16 Dec 2011 08:36
URI: http://eprints.iisc.ac.in/id/eprint/41224

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