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Role of residual stress and micro-cracks on the electrical resistivity of Si/SiO2/TiO2/Pt/PZTx-PMN(1-x) Multilayer Thin Film

Chakraborty, N and Mahapatra, DR and Sen, S (2008) Role of residual stress and micro-cracks on the electrical resistivity of Si/SiO2/TiO2/Pt/PZTx-PMN(1-x) Multilayer Thin Film. In: EMIT08 Int. Conf. Emerging Microelectronics and Interconnection Technologies.

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Item Type: Conference Paper
Department/Centre: Division of Mechanical Sciences > Aerospace Engineering(Formerly Aeronautical Engineering)
Depositing User: Ms V Mangala
Date Deposited: 27 Sep 2011 09:11
Last Modified: 27 Sep 2011 09:11
URI: http://eprints.iisc.ac.in/id/eprint/40928

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