Effect of Substrate and Annealing Temperatures on Mechanical Properties of Ti-rich NiTi Films

Kumar, A and Sharma, SK and Bysakh, S and Kamat, SV and Mohan, S (2010) Effect of Substrate and Annealing Temperatures on Mechanical Properties of Ti-rich NiTi Films. In: Journal of Materials Science & Technology, 26 (11). pp. 961-966.

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Abstract

The effect of substrate and annealing temperatures on mechanical properties of Ti-rich NiTi films deposited on Si (100) substrates by DC magnetron sputtering was studied by nanoindentation. NiTi films were deposited at two substrate temperatures viz. 300 and 400 degrees C. NiTi films deposited at 300 degrees C were annealed for 4 h at four different temperatures, i.e. 300, 400, 500 and 600 degrees C whereas films deposited at 400 degrees C were annealed for 4 h at three different temperatures, i.e. 400, 500 and 600 degrees C. The elastic modulus and hardness of the films were found to be the same in the as-deposited as well as annealed conditions for both substrate temperatures. For a given substrate temperature, the hardness and elastic modulus were found to remain unchanged as long as the films were amorphous. However, both elastic modulus and hardness showed an increase with increasing annealing temperature as the films become crystalline. The results were explained on the basis of the change in microstructure of the film with change in annealing temperature.

Item Type:	Journal Article
Publication:	Journal of Materials Science & Technology
Publisher:	Elsevier Science
Additional Information:	Copyright of this article belongs to Elsevier Science.
Keywords:	NiTi thin film; Annealing; Nanoindentation
Department/Centre:	Division of Physical & Mathematical Sciences > Instrumentation Appiled Physics
Date Deposited:	31 Jan 2011 09:45
Last Modified:	31 Jan 2011 09:45
URI:	http://eprints.iisc.ac.in/id/eprint/35304

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