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Piezoelectric zinc oxide thin film for MEMS application: A comparative study

Gokhale, Nikhil and Parmar, Mitesh and Rajanna, K and Nayak, MM (2008) Piezoelectric zinc oxide thin film for MEMS application: A comparative study. In: 3rd International Conference on Sensing Technology, NOV 30-DEC 03, 2008, Tainan.

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We report here, the study carried out on piezoelectric thin film for MEMS/Microsensor applications. The study includes characterization of sputtered thin film using indirect methods and comparison of behavior using cantilever technique for the confirmation of piezoelectric property. A suitable experimental setup was designed and fabricated for subjecting the cantilever to vibrate. The data was recorded for piezoelectric thin films deposited with different compositions. It is clearly evident that the direct method is inexpensive and easier for determining the quality of the deposited piezoelectric thin film.

Item Type: Conference Paper
Publisher: IEEE
Additional Information: Copyright 2008 IEEE. Personal use of this material is permitted. However, permission to reprint/republish this material for advertising or promotional purposes or for creating new collective works for resale or redistribution to servers or lists, or to reuse any copyrighted component of this work in other works must be obtained from the IEEE.
Department/Centre: Division of Physical & Mathematical Sciences > Instrumentation Appiled Physics
Date Deposited: 30 Mar 2010 10:10
Last Modified: 19 Sep 2010 05:58
URI: http://eprints.iisc.ac.in/id/eprint/26675

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