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Photosensitive sol-gel waveguides on silicon substrates as MOEM devices

Selvarajan, A and Kumar, Anil A and kumar, Anil DP and Hegde, GM and Srinivas, T (2000) Photosensitive sol-gel waveguides on silicon substrates as MOEM devices. In: Smart Structures and Materials 2000: Smart Electronics and MEMS, 6-8 March 2000, Newport Beach, CA, USA, pp. 53-60.

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Integrated optical components formed by sol-gel process and MEMS devices created on silicon substrate can be used to realize different types of sensing elements for smart structure applications. In this paper we report the fabrication of Ce, Ge and (Ce+Er) doped sol-gel based waveguides on silicon substrates and their optical characterization in terms of light amplification and photosensitivity. We also report results of fabrication and characterization of Bragg gratings in sol-gel based waveguides. The number of layers required for waveguidance and single mode operation has been calculated using the dispersion equations for asymmetric planar waveguides

Item Type: Conference Paper
Additional Information: Copyright of this article belongs to SPIE - The International Society for Optical Engineering
Keywords: Bragg gratings;micro optics;optical fabrication;optical planar waveguides;sol gel processing
Department/Centre: Division of Electrical Sciences > Electrical Communication Engineering
Depositing User: Srinivas B
Date Deposited: 08 Aug 2007
Last Modified: 27 Aug 2008 12:44
URI: http://eprints.iisc.ac.in/id/eprint/10426

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