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Some issues in mechanical design of MEMS transducers

Rudra, Pratap (2003) Some issues in mechanical design of MEMS transducers. In: SPIE:Smart Materials, Structures, and Systems, 12-14 December, Bangalore, India, Vol.5062, 788-793.

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The focus in MEMS technology is now slowly changing from process-centric research to design. More and more mechanical designers are entering MEMS field. However, most designers have intuitive feel for macro-scale designs, but not for micro-scale design. Intuition is an indispensable tool in design that cannot be replaced by brute force simulation. This paper is about some of the issues in mechanical design of MEMS transducer elements that are not yet a part of a designer's intuition. We discuss, through examples, why these issues belie our intuition at the micro-scale.

Item Type: Conference Paper
Publisher: The International Society for Optical Engineering
Additional Information: Copyright of this article belongs to The International Society for Optical Engineering.
Department/Centre: Division of Mechanical Sciences > Mechanical Engineering
Date Deposited: 27 Apr 2007
Last Modified: 11 Feb 2010 11:46
URI: http://eprints.iisc.ac.in/id/eprint/10200

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